ABSTRACT
Thermodynamics assists in elucidating important physical quantities and behavior of gases at low pressures. Among them, internal energy of gas, enthalpy, work performed by gases, gas heat capacities, and their relationships at low pressures are discussed in this chapter. The laws of thermodynamics can be applied to phase transformation, inherent saturated vapor pressures of solid and liquids, and evaporation processes at vacuum conditions in thin-film technology.
