ABSTRACT
A resonator is a structure that exhibits resonant behavior, meaning a resonator oscillates naturally with greater amplitude at its resonant frequencies than at others. The oscillations in a resonator can be either electromagnetic or mechanical. Guitar strings resonating at frequencies in audible range between 20 Hz and 20 kHz is a typical example of mechanical resonator in macro scale. A micromechanical resonator is a micromachined mechanical structure of much smaller size in a comparison with a guitar that can operate at much higher frequencies from kilohertz up to megahertz or even gigahertz. This frequency range is interesting for a variety of applications in electronic circuits and systems, which has attracted more attention and investment in recent years. Many Internet of things (IoT) devices can be connected to the Internet via wireless networks. The increasing amount of transmitted and received information requires accurate data transmissions. Satisfying these issues, micro clock generators for transmitters and receivers with a smaller size and higher performance are required.
