ABSTRACT
The steady growth of the microelectromechanical systems (MEMS) industry over the last two decades has been nothing short of incredible. Currently, it is an $8B industry (as of 2010), and by the year 2015 it is projected to more than double and become a $17B industry (Eloy, 2010). Furthermore, what was a technology with a very limited number of commercial applications available for decades, namely, inkjet heads, digital light projectors (DLP) and automobile sensors systems, is now becoming ubiquitous (Marek and Gómez, 2012).
