Over the recent years, micro/nano-structured surfaces as part of precision manufacturing processes have been taking increasing relevance. Such micro/nano aspects are key in developing the capabilities, functionalisation and performances of future industrial products. The biology, health, electronic, optics, transportation and energy industries are examples of business sectors already benefiting from such processes. However, compared to manufacturing processes at the micrometre and nanometre levels, the ability to control, measure and characterise such features in three dimensions (3D) needs to be further developed. Advanced research in micro-and nanometrology is important, which will help in understanding the performance of micro/nano-structured surfaces at the micro world.