Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text:

  • Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements
  • Addresses interferometry, holography, and speckle methods and applications
  • Explains Moiré metrology and the optical heterodyne measurement method
  • Delves into the specifics of diffraction, scattering, polarization, and near-field optics
  • Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes

This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

section 1|158 pages

Fundamentals of Optical Elements and Devices

chapter 1|84 pages

Light Sources

chapter 2|20 pages

Lenses, Prisms, and Mirrors

chapter 3|31 pages

Optoelectronic Sensors

section 2|243 pages

Fundamentals of Principles and Techniques for Metrology

chapter 5|35 pages

Propagation of Light

chapter 6|27 pages


chapter 7|24 pages


chapter 9|26 pages

Moiré Metrology

chapter 11|11 pages


chapter 12|18 pages

Light Scattering

chapter 13|16 pages


chapter 14|13 pages

Near-Field Optics

section 3|485 pages

Practical Applications

chapter 15|27 pages

Length and Size

chapter 16|18 pages


chapter 17|10 pages

Straightness and Alignment

chapter 18|13 pages


chapter 19|41 pages

Surface Profilometry

chapter 21|13 pages

Fringe Analysis

chapter 22|28 pages


chapter 23|21 pages

Optical Methods in Solid Mechanics

chapter 24|22 pages

Optical Methods in Flow Measurement

chapter 25|49 pages


chapter 26|27 pages

Birefringence Measurement

chapter 27|20 pages


chapter 34|21 pages

On-Machine Measurements