The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.

The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:

  • Thin-film integrated passives as an alternative to discrete passives
  • The possibility of piezoelectric MEMS
  • Solutions for MEMS gyroscopes
  • Advanced interconnect technologies
  • Ambient energy harvesting
  • Bulk acoustic wave resonators
  • Ultrasonic receiver arrays using MEMS sensors
  • Optical MEMS-based spectrometers
  • The integration of MEMS resonators with conventional circuitry
  • A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns
  • Wireless microactuators to enable implantable MEMS devices for drug delivery
  • MEMS technologies for tactile sensing and actuation in robotics
  • MEMS-based micro hot-plate devices
  • Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring
  • Sensors using passive acousto-electric devices in wired and wireless systems

Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

section I|202 pages

Breakthrough Technology

chapter 1|17 pages

Microsystems to Nano-Microsystems

A Technological Breakthrough
ByDaniel Hauden

chapter 2|19 pages

HfO2-Based High-κ Dielectrics for Use in MEMS Applications

ByBing Miao, Rajat Mahapatra, Nick Wright, Alton Horsfall

chapter 3|27 pages

Piezoelectric Thin Films for MEMS Applications

ByIsaku Kanno

chapter 4|22 pages

CMOS Systems and Interfaces for Sub-Deg/Hr Microgyroscopes

ByAjit Sharma, Mohammad Faisal Zaman, Farrokh Ayazi

chapter 5|20 pages

Bulk Acoustic Wave Gyroscopes

ByHouri Johari

chapter 6|20 pages

Mechanically Flexible Interconnects and TSVs

Applications in CMOS/MEMS Integration
ByHyung Suk Yang, Paragkumar Thadesar, Chaoqi Zhang, Muhannad Bakir

chapter 7|29 pages

Modeling of Piezoelectric MEMS Vibration Energy Harvesters

ByMarcin Marzencki, Skandar Basrour

chapter 8|21 pages

Interface Circuits for Capacitive MEMS Gyroscopes

ByHongzhi Sun, Huikai Xie

chapter 9|20 pages

Electromechanical Loops for High-Performance and Robust Gyroscope System Design

ByVikas Choudhary, Abhinav Dikshit, Anjan Kumar, Deva Phanindra Kumar, Saravanan Kamatchi, Nemai Biswas

section II|238 pages

MEMS-Based Novel Applications

chapter 10|22 pages

Bulk Acoustic Wave Resonators for Mobile Communication Systems

BySumy Jose

chapter 11|21 pages

Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applications

ByJ. R. Gonzalez, Mohamed Saad, Chris J. Bleakley

chapter 12|23 pages

MEMS-Based Lamellar Grating Fourier Transform Spectrometers

ByHongbin Yu, Guangya Zhou, Fook Siong Chau

chapter 13|40 pages

Microelectromechanical Resonators for RF Applications

ByFrederic Nabki, Tomas A. Dusatko, Mourad N. El-Gamal

chapter 14|18 pages

Rigid Body Motion Capturing by Means of a Wearable Inertial and Magnetic MEMS Sensor Assembly—From Reconstitution of the Posture toward Dead Reckoning

An Application in Bio-Logging
ByHassen Fourati, Noureddine Manamanni, Lissan Afilal, Yves Handrich

chapter 15|19 pages

Radio-Controlled Wireless MEMS Actuators and Applications

ByMohamed Sultan Mohamed Ali, Kenichi Takahata

chapter 16|30 pages

Advanced MEMS Technologies for Tactile Sensing and Actuation

ByM. Amato, Massimo De Vittorio, S. Petroni

chapter 17|19 pages

MEMS-Based Micro Hot-Plate Devices

ByJürgen Hildenbrand, Andreas Greiner, Jan G. Korvink

chapter 18|15 pages

A Wireless Sensor Networks Enabled Inertial Sensor

ByYao-Chiang Kan

chapter 19|24 pages

Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications

BySylvain Ballandras, Gilles Martin, Jean-Michel Friedt, Victor Plessky, Virginie Blondeau-Pâtissier, William Daniau, Thomas Baron, Luc Chommeloux, Stéphane Tourette, Jean-François Leguen, Bruno François, Christophe Droit, Meddy Vanotti, Marc Lamothe, David Rabus, Nicolas Chrétien, Emile Carry